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Page Updated / Information Current: 08/04/08
Novellus Parts Inventory
| OEM PART NUMBER | RAM PART NUMBER | DESCRIPTION |
| 02-00008-00 | 0080-09450- | KIT,GAS DISP PLT ADJ |
| 02-00055-00 | 0060-18419-01 | SWITCH, FOOT W/CABLE 20A |
| 02-00093-00 | 0061-17809-01 | SOP-17 ROBOT ASSY, 90V |
| 02-00330-00 | 0041-02275-01 | BOARD ASSY, SENSE PIN BREAKOUT |
| 02-00343-02 | 0011-08264-01 | HARNESS ASSY, SENSOR, 12.0", WITH TWO BANNER SP100AF SENSORS |
| 02-00343-04 | 0011-08269-01 | HARNESS ASSY, SENSOR, 26.5", WITH 2 BANNER SP100AF SENSORS |
| 02-00402-02 | 0011-08263-01 | HARNESS ASSY, SENSOR, 12.0" |
| 02-00402-03 | 0011-08265-01 | HARNESS ASSY, SENSOR, 17.5" |
| 02-024546-00 | 0021-09100-01 | KIT, EXTERNAL HEATED VALVES |
| 02-028035-00 | 0045-02959-B | C1 UI COMPUTER PENTIUM, W/O EXT FLOPPY |
| 02-033877-00 | 0080-09111-01 | KIT, HEATER INSTALL C1-150 |
| 02-106507-00 | 0018-06900-01 | FERROFLUIDIC SPINDLE ASSY |
| 02-153908-00 | 0061-14965-01 | RE-MFG LEGACY ROBOT ASSY, Z-MOTOR |
| 02-257924-01 | 0061-00972-01 | ASSY,FEEDTHRU,RF
PWR,SEQUEL, TEFLON INSULATOR |
| 03-00022-09 | 0011-03222-01 | CABLE ASSY, CA283 |
| 03-00028-01 | 0021-00603-C | ASSY, CABLE CA 29 (EXTENDED VALVES VERSION) |
| 03-00037-00 | 0011-03217-01 | CABLE ASSY, CA 83 |
| 03-00047-00 | 0011-00620-01 | ASSY, CABLE CA 73 |
| 03-00063-00 | 0011-08270-01 | HARNESS ASSY, SENSOR, SPINDLE |
| 03-00067-00 | 0011-03226-01 | CABLE ASSY, CABLE 119 |
| 03-00071-00 | 0011-03816-01 | CABLE CA118, LIFT MOTOR TO MAIN A/C, C1 |
| 03-00073-00 | 0011-00626-01 | ASSY, CABLE CA 87, CDA AIR SWITCH TO FAC PANEL |
| 03-00074-00 | 0011-08259-01 | HARNESS ASSY, CASSETTE DOOR SENSOR |
| 03-00075-01 | 0011-03011-01 | CA100, 20 FT. LFGENERATOR SIGNAL FOR ENI PL2HF |
| 03-00082-00 | 0011-00627-01 | ASSY, CABLE CA 90 |
| 03-00093-00 | 0011-00691-01 | ASSY, LIFT/EXT SENSOR HARNESS |
| 03-00096-02 | 0011-00584-01 | ASSY, CABLE CA 12, NG |
| 03-00105-00 | 0011-03202-01 | CABLE ASSY, CA 126, INDEXER PCB GROUND WIRE |
| 03-00123-03 | 0011-00658-01 | ASSY, CABLE, CA 14, NG, TERMINAL PANEL TO GAS BOX, C1 |
| 03-00123-04 | 0011-00592-01 | ASSY, CABLE CA 17, NG, TERMINAL PANEL TO GAS BOX, C1 |
| 03-00123-05 | 0011-00594-01 | ASSY, CABLE CA 18, NG, TERMINAL PANEL TO GAS BOX, C1 |
| 03-00125-03 | 0011-03019-01 | CA140 HF COAX CABLE 200MM 60 FT. |
| 03-00129-01 | 0011-00582-01 | ASSY, CABLE CA 1, NG |
| 03-00129-02 | 0011-00596-01 | ASSY, CABLE CA 2, NG |
| 03-00129-04 | 0011-00610-01 | ASSY, CABLE CA 4, NG |
| 03-00129-06 | 0011-11486-01 | MULTIBUS D-I/O CARD TO TERMINAL PANEL,CA 38, NG |
| 03-00130-01 | 0011-03814-01 | CABLE CA 6, NG |
| 03-00130-02 | 0011-03815-01 | CABLE CA 7, NG |
| 03-00130-03 | 0011-00609-01 | ASSY, CABLE CA 37, NG |
| 03-00131-01 | 0011-00601-01 | ASSY, CABLE CA 27, NG |
| 03-00132-01 | 0011-00606-01 | ASSY, CABLE CA 32, NG |
| 03-00132-02 | 0011-00607-01 | ASSY, CABLE CA 33, NG |
| 03-00134-00 | 0011-00598-01 | ASSY, CABLE CA 22, NG |
| 03-00136-00 | 0011-00586-01 | ASSY, CABLE CA 142 EMIT |
| 03-00143-02 | 0011-03031-01 | CA96 45 FT. HF GENERATOR SIGNAL (FOR ALL HF GENERATOR TYPES) |
| 03-00149-00 | 0011-00590-01 | ASSY, CABLE CA 150 |
| 03-00176-02 | 0011-00633-01 | ASSY, CABLE CA180 (18 FT) |
| 03-00176-03 | 0011-00634-01 | ASSY, CABLE CA180 (30 FT) |
| 03-00209-00 | 0011-03221-01 | CABLE ASSY, CA246 (SIGNAL CABLE WITH 3 PLUGS) |
| 03-00212-01 | 0011-00653-01 | ASSY, CABLE LFCA CA249 |
| 03-00212-02 | 0011-00654-01 | ASSY, CABLE LFCB CA250 (SAME AS CA249) |
| 03-00212-03 | 0011-00655-01 | ASSY, CABLE LFCC CA251 (SAME AS CA249) |
| 03-00219-00 | 0011-00656-01 | ASSY, CABLE TRAZAR MN CA256 |
| 03-00238-00 | 0014-18382-01 | SWITCH ASSY, WATER FLOW, W/CABLE |
| 03-00244-01 | 0011-03206-01 | CABLE ASSY, CA 267 |
| 03-00247-00 | 0011-03207-01 | CABLE ASSY, CA 269, DUAL SENSOR |
| 03-00253-00 | 0011-00547-01 | ASSY CABLE, TEOS CNTL.CA298 |
| 03-00267-03 | 0011-03034-01 | CA99, 40 FT., MAIN SYSTEM CONTROL TO REMOTE A/C |
| 03-00267-04 | 0011-03035-01 | CA99, 50 FT., MAIN SYSTEM CONTROL TO REMOTE A/C |
| 03-00267-05 | 0011-03036-01 | CA99, 60 FT., MAIN SYSTEM CONTROL TO REMOTE A/C |
| 03-00274-00 | 0011-03845-01 | CABLE, CASSETTE DOOR CA282 |
| 03-00286-00 | 0011-00546-01 | ASSY CABLE, CA292 PILOT VLV |
| 03-00288-02 | 0011-03025-01 | CA57 HF COAX CABLE 150MM 36 FT. |
| 03-00288-03 | 0011-03026-01 | CA57 HF COAX CABLE 150MM 60 FT. |
| 03-00293-00 | 0011-03210-01 | CABLE ASSY, CA 295 |
| 03-00294-00 | 0011-03211-01 | CABLE ASSY, CA 296 (SINGLE DETECTOR) |
| 03-00295-00 | 0011-03879-01 | CABLE, ROTATION SENSOR |
| 03-00296-00 | 0011-03856-01 | CABLE, LIFT/EXT SENSOR |
| 03-00298-00 | 0011-03224-01 | CABLE ASSY, CA299 (TORROIDAL COILS) |
| 03-00299-00 | 0014-08727-01 | INDUCTOR, RF ISOLATION CKT (NG) |
| 03-00304-02 | 0011-00645-01 | ASSY, CABLE CA303-2 |
| 03-00313-01 | 0011-03013-01 | CA102 LF COAX CABLE 12 FT. |
| 03-00313-02 | 0011-03014-01 | CA102 LF COAX CABLE 36 FT. |
| 03-00313-03 | 0011-03015-01 | CA102 LF COAX CABLE 60 FT. |
| 03-021442-00 | 0011-03152-01 | CABLE ASSLY, I/F BOARD, MEGAPAC (I/F PCB TO LOWER A/C) |
| 03-029112-00 | 0011-00652-01 | ASSY, CABLE ENDPOINT RS-232 |
| 03-032159-00 | 0011-03139-01 | CABLE ASSEMBLY, 9 PIN BREAK OUT TEST |
| 03-032160-00 | 0011-03792-01 | CABLE ASSY. 15 PIN BREAK OUT TEST CABLE |
| 03-032161-00 | 0011-03837-01 | CABLE, ASSEMBLY 25 PIN BREAK OUT TEST CABLE |
| 03-032162-00 | 0011-03793-01 | CABLE ASSY. 37 PIN BREAK OUT TEST CABLE |
| 03-032163-00 | 0011-03794-01 | CABLE ASSY. 50 PIN BREAK OUT TEST CABLE |
| 03-032579-02 | 0011-03023-01 | CA310 45 FT LF GEN SIGNAL ADV ENRGYPDX 1400 (IN PLACE OF CA100) |
| 03-10193-00 | 0011-03234-01 | CABLE ASSY, EMO/CONTROL SIGNALS |
| 03-10197-00 | 0011-03267-01 | CABLE ASSY, RS-485 INTERCONNECT |
| 03-10209-00 | 0011-05900-01 | CVD PUMP INTERFACE CABLE 50 FT. C2 |
| 03-10328-00 | 0011-00690-01 | ASSY, JUMPER, EMO E.O.L. |
| 03-104931-00 | 0011-03954-01 | CABLE,FLOPPY POWER, LONG |
| 03-104932-00 | 0011-03953-01 | CABLE,FLOPPY POWER SOURCE |
| 03-104933-00 | 0011-03956-01 | CABLE,FLOPPY SIGNAL,MALE HEAD (INSIDE UI) |
| 03-104934-00 | 0011-03955-01 | CABLE,FLOPPY SIGNAL,FEMALE (WIDE RIBBON CABLE) |
| 03-10509-00 | 0011-03838-01 | CABLE, ASSY, IOC DC POWER |
| 03-10735-04 | 0011-03270-01 | CABLE ASSY, SYS EMO AND ENABLE |
| 03-155625-02 | 0011-03272-01 | CABLE ASSY, ZETA EXTENSION, OEM750 DRIVER TO ROBOT, C1 ROBOT |
| 04-1433771-00 | 0080-09089-01 | KIT, 375 CONVECTRON CONVERSION |
| 04-149581-00 | 0080-10447-01 | LFC KIT, P2000I PIEZO, 5ML TEOS, NOVELLUS SIGMA 6 |
| 04-707819-02 | 0061-15887-01 | ROTOR, QUANTUM HOUSING |
| 05-00007-00 | 0080-14291-01 | PM KIT, REACTOR CHAMBER |
| 05-00008-00 | 0080-14286-01 | PM KIT, HEATER BLOCK |
| 05-00011-00 | 0080-09132-01 | PM KIT, GAS FEEDTHRU |
| 05-00019-00 | 0080-00154-01 | 70V DRIVER KIT WITH CABLES |
| 05-00023-00 | 0080-14292-01 | PM KIT, SEMI-ANNUAL |
| 05-00024-00 | 0080-14288-01 | PM KIT, HTR CONN, DUAL FR |
| 05-047249-00 | 0080-10117-01 | KIT,UPGRD FROM 386 TO PENTIUM |
| 05-058485-01 | 0090-06687-01 | ELO TOUCHSCREEN UPGRADE NEW |
| 05-10339-00 | 0080-9118-01 | KIT, LOADLOCK DOOR SEALS |
| 05-10341-00 | 0080-08717- | INDEXERS BELT KIT, PM |
| 05-113581-00 | 0080-09081- | KIT RETROFIT DUAL EPD C1-D-150 |
| 05-119299-00 | 0042-10662-01 | MAIN. MONITOR UPGRADE |
| 05-119299-02 | 0080-09250-01 | KIT,C1,LCD UPGRD/WAS ZYNK VGA |
| 05-50002-00 | 0080-09086- | KIT, 0.05 MICRON FILTER KIT |
| 10-00040-00 | 0064-21506-01 | TUBING, 1/8" OD, PVC |
| 10-00045-00 | 0032-18927-01 | TUBE ASSY, A GAS, UPPER, VCR, 150MM |
| 10-00046-00 | 0032-18931-01 | TUBE ASSY, B GAS, UPPER, VCR, 150MM |
| 10-00068-00 | 0090-22443-01 | WATER LINE, FAC PANEL - TOP PLATE |
| 10-00069-00 | 0032-22445-01 | WATER LINE, TOP PLATE - BOTTOM PLATE |
| 10-00070-00 | 0032-22442-01 | WATER LINE, BOTTOM PLATE |
| 10-00072-00 | 0032-08905-01 | INSULATOR, GAS DIST., TEFLON TUBE (STANDARD) |
| 10-00079-00 | 0035-00160-01 | A-GAS UPPER |
| 10-00080-00 | 0035-01831-01 | B-GAS UPPER |
| 10-00091-00 | 0032-21380-01 | TUBE WLDMT, MANIFOLD, PURGE GAS, 11-CH GAS BOX, C1 |
| 10-00092-00 | 0032-21378-01 | TUBE WLDMT, GAS OUTLET "A" MAN, 11-CH GAS BOX, C1 |
| 10-00093-00 | 0032-21379-01 | TUBE WLDMT, GAS OUTLET "B" MAN, 11-CH GAS BOX, C1 |
| 10-00094-00 | 0032-21381-01 | TUBE WLDMT, VACUUM MANIFOLD, 11-CH GAS BOX, C1 |
| 10-00095-00 | 0032-19019-01 | TUBE ASSY, GAS DIST (TROMBONE) |
| 10-00096-00 | 0035-18946-01 | TUBE ASSEMBLY, VCO B-GAS, LOWER, 200MM |
| 10-00097-00 | 0035-18944-01 | TUBE ASSEMBLY, VCO A-GAS, LOWER, 200MM |
| 10-00101-00 | 0035-19118-B | TUBE ASSY, VCO B GAS UPPER, 200MM |
| 10-00102-00 | 0035-19116-B | TUBE ASSY, VCO A-GAS, LOWER, 200MM |
| 10-00122-00 | 0032-19070-01 | TUBE ASSY, MFC OUT B23, 11- CH GAS BOX, C1 |
| 10-00128-00 | 0035-18930-01 | TUBE ASSEMBLY B GAS LOWER VCR 200MM (11-CH EXTERNAL) |
| 10-00129-00 | 0032-18928-B | TUBE ASSEMBLY A GAS UPPER VCR 200MM |
| 10-00130-00 | 0032-18932-B | TUBE ASSEMBLY B GAS UPPER VCR 200MM |
| 10-00131-00 | 0035-18981-01 | TUBE ASSY, A-GAS LOWER, VCR, C1 |
| 10-00174-00 | 0032-10700-01 | MANIFOLD CAP MONOMETER |
| 10-00241-00 | 0032-22446-01 | WATER LINE, WATER FLOW OUT |
| 10-00242-00 | 0032-22444-01 | WATER LINE, FLOW-SW CONNECT |
| 10-00279-00 | 0032-19082-01 | TUBE ASSY, PURGE PANEL TO LL, LOWER |
| 10-00280-00 | 0035-19083-01 | TUBE ASSY, PURGE PANEL TO LL, UPPER |
| 10-00340-00 | 0035-19000-01 | TUBE ASSY, DEGAS TO TEOS OUTLET |
| 10-00371-00 | 0032-00734-01 | ASSY, TUBE 1.8" DOPED |
| 10-00372-00 | 0035-00735-01 | ASSY, TUBE 1/8" UNDOPED |
| 10-00376-00 | 0035-00743-01 | ASSY, TUBE, LFC ADAPTER |
| 10-00377-00 | 0032-00737-01 | ASSY, TUBE LFC OUTLET, TMB,TMP |
| 10-00378-00 | 0035-00742-01 | ASSY, TUBE, FILTER INLET |
| 10-00379-00 | 0032-00744-01 | ASSY, TUBE, MIXING MANIFOLD |
| 10-00380-00 | 0032-19010-01 | TUBE ASSY, DUMP MANIFOLD |
| 10-00395-02 | 0099-18925-01 | TUBE ASSY, A GAS, LOWER, VCR, 150MM, NG |
| 10-00396-02 | 0035-18929-01 | TUBE ASSEMBLY B GAS LOWER VCR 150MM NEW GEN (9-CH) |
| 10-00409-00 | 0035-19041-01 | TUBE ASSY, LFC OUTLET |
| 10-00415-00 | 0035-19011-01 | TUBE ASSY, DUMP MANIFOLD |
| 10-00421-00 | 0032-21517-01 | TUBING, PURGE LINE, 1/16" |
| 10-00432-00 | 0032-19074-01 | TUBE ASSY, PRESSURE CONTROL SIGNAL |
| 10-00433-00 | 0032-19044-01 | TUBE ASSY, LL DIFFERENTIAL PRESSURE |
| 10-023100-00 | 0035-19108-01 | TUBE ASSY, UNDOPED TEOS OUTLET |
| 10-024503-00 | 0035-21388-01 | TUBE, ASSY, DIVERT, TEOS |
| 10-032699-00 | 0032-21505-01 | TUBING, 1/4" OD, POLYURETHANE |
| 15-00003-02 | 0061-18806-01 | TOP PLATE 150MM |
| 15-00007-00 | 0061-17874-B | SPACER, REAR, C1 FRONT MONITOR |
| 15-00009-01 | 0061-02582-01 | BRACKET, RF DRUM MTG, WEDGE SHAPED, 200MM, C1 |
| 15-00010-00 | 0061-17991-01 | SPINDLE MOUNTING PLATE, 150 MM |
| 15-00015-01 | 0061-13915-01 | PLATE, LIFT DRIVE MECHANISM (150MM) |
| 15-00027-02 | 0061-08102-01 | GUIDE NOZZEL ADJUSTER |
| 15-00043-02 | 0065-00271-01 | ADJUSTER, CERAMIC, GAS PLATE |
| 15-00074-01 | 0061-02231-01 | BLOCK, LOAD LOCK DOOR CYLINDER |
| 15-00075-00 | 0061-02554-01 | BRACKET, LL SUPPORT |
| 15-00079-00 | 0061-02261-01 | BLOCK. BAFFLE BEARING |
| 15-00092-00 | 0061-04810-01 | CLAMP, LOADLOCK PORT |
| 15-00126-00 | 0062-18216-01 | STRAP, HEATER GROUND, ALUM |
| 15-00180-00 | 0064-05774-01 | COVER, TERMINAL PANEL, C1 |
| 15-00208-00 | 0061-02526-01 | BRACKET, DISTRIB TUNER, SUPPORT (150MM) |
| 15-00224-00 | 0061-04788-01 | CLAMP, LIFT SHAFT (SQUARED END-PART OF MAIN FRAME SUPPORT BRACKET) |
| 15-00270-00 | 0041-18335-01 | SUPPORT, PLATFORM BRACKET 5 INCH, 150MM LEFT, C1 |
| 15-00270-01 | 0041-18334-01 | SUPPORT, PLATFORM 5", 150 MM, RIGHT |
| 15-00287-00 | 0061-17855-01 | SPACER, PLATE UPPER |
| 15-00288-00 | 0061-17853-01 | SPACER, PLATE LOWER |
| 15-00293-01 | 801-64-0151 | HOOK, BRACKET, RIGHT (100/125/150MM) |
| 15-00293-01 | 801-64-01511 | HOOK, BRACKET, LEFT (100/125/150MM) |
| 15-00309-00 | 0062-08150-01 | HANGER NOZZEL 1.33 (150MM) |
| 15-00309-01 | 0062-08151-01 | HANGER NOZZEL 1.50 (200MM) |
| 15-00341-00 | 0002-16394-01 | SCREW, 1/4-20 X 1/4, NI |
| 15-00343-00 | 0062-08090-01 | GUARD, SWITCH |
| 15-00357-00 | 0061-04834-01 | CLAMP, SHAFT COUPLING |
| 15-00358-00 | 0061-18188-01 | STOP BLOCK, SPINDLE LIFT, 1.12L (150MM) |
| 15-00359-00 | 0061-07291-01 | FLANGE, SPLINE, TOP, INDEXER, C1 |
| 15-00362-00 | 0061-07290-01 | FLANGE, SPLINE, BOTTOM, INDEXER, C1 |
| 15-00371-00 | 0002-11709-01 | NUT, HEX, 1/4-28, NI |
| 15-00372-00 | 0004-22290-01 | WASHER, NI, 1/4 |
| 15-00376-00 | 0061-13704-01 | PIN, SPINDLE LIFT GUIDE, INDEXER, C1 |
| 15-00385-00 | 0002-11603-01 | NUT, HEX, 10-32,NI |
| 15-00386-00 | 0004-22269-01 | WASHER, FLAT, #10, NI |
| 15-00399-02 | 0002-16578-01 | SCREW, TOP SPINDLE |
| 15-00399-03 | 0002-16579-01 | SCREW, TOP SPINDLE |
| 15-00399-04 | 0002-16426-01 | SCREW, 1.02LG, TOP SPINDLE |
| 15-00399-05 | 0002-16427-01 | SCREW, 1.12LG, TOP SPINDLE |
| 15-00401-00 | 0061-17169-04 | SHAFT, SPINDLE |
| 15-00410-00 | 0064-06963-01 | FILTER, UV, LEXAN |
| 15-00462-00 | 0064-13939-01 | PLATE, RF DIST, INSULATION (150MM) |
| 15-00475-00 | 0065-08910-01 | INSULATOR, GAS FEEDTHRU |
| 15-00477-00 | 0061-13877-01 | PLATE, BOTTOM, 150MM |
| 15-00483-00 | 0065-15639-01 | RING, HEATER HUB, CERAMIC |
| 15-00485-00 | 0062-02566-01 | BRACKET, PADDLE, 150MM |
| 15-00532-00 | 0064-13167-01 | PAD, BRAKE |
| 15-00553-05 | 0062-08355-01 | HEATER SHIM, FLAT .005 THICK |
| 15-00553-10 | 0062-08356-01 | HEATER SHIM, FLAT .010 THICK |
| 15-00553-18 | 0062-08357-01 | HEATER SHIM, FLAT .018 THICK |
| 15-00553-25 | 0062-08358-01 | HEATER SHIM, FLAT .025 THICK |
| 15-00553-31 | 0062-08359-01 | HEATER SHIM, FLAT .031 THICK |
| 15-00554-05 | 0062-17513-01 | SHIM, V .005 THICK |
| 15-00554-10 | 0062-17514-01 | SHIM, V .010 THICK |
| 15-00554-18 | 0062-17515-01 | SHIM, V .018 THICK |
| 15-00554-25 | 0062-17516-01 | SHIM, V .025 THICK |
| 15-00554-31 | 0062-17517-01 | SHIM, V .031 THICK |
| 15-00566-00 | 0061-04482-01 | CHAMBER RING, REACTOR, 150MM |
| 15-00567-00 | 0065-21402-01 | TUBE, TC, 1/8" ID, CERAMIC |
| 15-00579-00 | 0062-02512-01 | BRACKET, AUDIBLE ALARM, 9-PIN D'SUB CONN (RAM VERSION IS L-BRACKET) |
| 15-00589-00 | 0061-10713-01 | MANIFOLD, 7 STATION |
| 15-00602-00 | 0064-13940-01 | PLATE, RF DIST, INSULATION (200MM) |
| 15-00614-00 | 0061-14345-01 | POST, DISTRIBUTION TUNER (200MM) |
| 15-00619-00 | 0061-13878-01 | PLATE, BOTTOM, 200MM |
| 15-00622-00 | 0061-13916-01 | PLATE, LIFT DRIVE MECHANISM (200MM) |
| 15-00636-00 | 0061-04855-01 | CLAMP, WOPS, UPPER |
| 15-00645-00 | 0061-02236-01 | BLOCK, SIDE MONITOR BEZEL, KEYBOARD COVER LATCH |
| 15-00653-00 | 0061-04837-01 | CLAMP, SPINDLE HUB MOUNT |
| 15-00654-00 | 0061-04832-01 | CLAMP, ROTATION ADJUSTMENT |
| 15-00655-00 | 0061-00356-01 | ALIGNMENT BLOCK, SPINDLE FORKS (SPECIAL REQUEST ONLY) |
| 15-00680-00 | 0065-17754-01 | SLEEVE, TC, CERAMIC |
| 15-00684-00 | 0065-04098-01 | CAP, TC, 1/16 |
| 15-00686-00 | 0061-22276-01 | WASHER, GAS FEEDTHRU 1/2" ID ALUM |
| 15-00691-00 | 0061-22602-01 | WOPS MOUNTING BLOCK, ROUND (ALUMINUM ) |
| 15-00698-00 | 0061-16492-01 | SCREW, FORK |
| 15-00699-01 | 0065-07408-01 | FORK, FINGER, 150MM |
| 15-00700-00 | 0061-13892-01 | PLATE, FORK RETAINER, BOTTOM, 200M |
| 15-00701-00 | 0061-13891-01 | PLATE, FORK RETAINER, BOTTOM, 150MM |
| 15-00702-00 | 0061-13895-01 | PLATE, FORK RETAINER, TOP, 200MM |
| 15-00703-00 | 0061-13894-01 | PLATE, FORK RETAINER, TOP, 150MM |
| 15-00712-00 | 0061-04853-01 | CLAMP, WOPS, LOWER |
| 15-00721-00 | 0004-22263-01 | WASHER, #8, NI |
| 15-00729-00 | 0061-04773-01 | CLAMP, FLAT |
| 15-00737-00 | 0061-18187-01 | STOP BLOCK, SPINDLE LIFT, 1.03L (200MM) |
| 15-00742-00 | 0065-21403-01 | TUBE, TC, CERAMIC |
| 15-00745-00 | 0033-07175-B | FITTING, PORT (BASEPLATE FITTING FOR RF ISOLATED TC) |
| 15-00774-00 | 0061-02169-01 | BKT, ADAPTOR-LEMO |
| 15-00806-01 | 0061-05933-B | CYLINDER LINK, TUNGSTEN, NEW STYLE, C1 |
| 15-00915-01 | 0061-13908-01 | PLATE, INSULATION-RIGHT HAND |
| 15-00915-02 | 0061-13907-01 | PLATE, INSULATION-LEFT HAND |
| 15-00916-00 | 0090-13917-01 | PLATE, MOUNTING |
| 15-00935-01 | 0002-16589-01 | SCREW,#10=32X.50LG,NICKEL |
| 15-00981-00 | 0061-14348-01 | POST, MOUNTING, COVER, EXHAUST HOUSING |
| 15-01004-00 | 0061-14147-01 | PLATFORM, CASSETTE, OPTICAL (100/125/150MM) |
| 15-01022-00 | 0062-13934-01 | PLATE, RF DIST, COPPER (150MM) |
| 15-01032-00 | 0061-04815-01 | CLAMP, PIPE 2.00 DIA |
| 15-01033-00 | 0061-04833-01 | CLAMP, SHAFT 1.50 DIA |
| 15-01039-00 | 0032-07163-B | FITTING, AIR INLET |
| 15-01050-01 | 0062-17510-01 | SHIM, PADDLE .001 THICK, NI |
| 15-01050-02 | 0062-17511-01 | SHIM, PADDLE .002 THICK, NI |
| 15-01050-03 | 0062-17512-01 | SHIM, PADDLE, .003, NI |
| 15-01058-01 | 0064-02500-01 | BRACKET FRONT, RIGHT |
| 15-01058-02 | 0064-02540-01 | BRACKET, FRONT, LEFT |
| 15-01132-00 | 0061-08577-01 | HOUSING, SHAFT BEARINGS |
| 15-01133-00 | 0061-02546-B | BRACKET, INDEXER MAIN FRAME 150MM, C1 |
| 15-01134-00 | 0061-08710-C | INDEXER MAIN FRAME, 200MM, C1 |
| 15-01138-00 | 0090-07287-01 | FLANGE, SINGLE ENDPOINT |
| 15-01144-00 | 0064-06962-01 | FILTER, UV, ENDPOINT FLANGE |
| 15-01146-00 | 0064-13289-01 | PANEL, SIDE LL (LARGE LEXAN FOR KEYBOARD SIDE) |
| 15-01176-00 | 0061-02577-01 | BRACKET, REAR CASSETTE HOLDER |
| 15-024498-00 | 0021-07296-01 | FLANGE, VALVE ADAPTER |
| 15-029506-00 | 0061-07318-01 | FLANGE,VIEWPORT,DUAL ENDPOINT,QUARTZ |
| 15-032014-00 | 0066-22519-01 | WINDOW, QUARTZ, ETCH RESISTANT |
| 15-032016-00 | 0065-13724-01 | PIN,CERAMIC VENTED FOR HTR BLK |
| 15-032204-00 | 0021-18341-01 | SUPPORT, VALVE |
| 15-032631-00 | 0061-07282-01 | FLANGE, SPINDLE |
| 15-053394-01 | 0065-11196-01 | MINIMUM CONTACT AREA FORK, 150MM |
| 15-053394-02 | 0065-11197-01 | MINIMUM CONTACT AREA FORK, 200MM |
| 15-103913-02 | 0033-08136-01 | HALF CLAMP,NEW ELECTRICAL FEEDTHRU,NICKL |
| 15-10571-00 | 0062-02599-01 | BRACKET, TOP PLATE NUPRO MOUNT, 150MM OR 200 MM |
| 15-107698-00 | 0065-17751-01 | SLEEVE, FLANGED, RF BIAS FEEDTHRU, NEW STYLE, CERAMIC (LG HOLE) |
| 15-108174-00 | 0061-05896-01 | CUP,SCREW COVER |
| 15-108307-00 | 0062-04924-01 | CLAMP,STRAP,NEW ELECTRICAL FEEDTHRU |
| 15-110411-00 | 0066-22542-01 | WINDOW,SAPPHIRE (QTY 1 ONLY WHEN SELECTED) |
| 15-112561-00 | 0061-07319-01 | FLANGE,VIEWPORT,DUAL ENDPOINT,SAPPHIRE |
| 15-112882-00 | 0003-02535-01 | BRACKET, FIBER OPTIC MOUNT, RED WOPS |
| 15-114331-00 | 0002-15997-01 | SCREW, 1/4-20 X 50LG, NICKEL, CAP |
| 15-11666-00 | 0061-10815-01 | MESC STANDARD, REV X2 |
| 15-11690-00 | 0064-22069-01 | VIEWPORT, CASSETTE CHAMBER, LEXAN |
| 16-00004-01 | 0062-13365-01 | PANEL,RIGHT,FORWARD,C1 (13) |
| 16-00029-01 | 0062-13370-01 | PANEL,RIGHT,MIDDLE,UPPER, |
| 16-00030-01 | 0062-13366-01 | PANEL,RIGHT,MIDDLE,LOWER,C1 (12) |
| 16-00034-01 | 0062-13355-01 | PANEL,REAR,LOWER,C1 (8) |
| 16-00035-00 | 0062-13325-01 | PANEL,FRONT,C1 |
| 16-00050-00 | 0032-00243-01 | ADAPTER, FLANGE EXHAUST DUCT |
| 16-00055-00 | 0061-18177-01 | STEEL BUSHING,GASBOX EXHAUST, 2" OD |
| 16-00062-01 | 0062-13212-01 | PANEL BRACKET, LOWER LEFT |
| 16-00062-02 | 0062-13213-01 | PANEL BRACKET, LOWER RIGHT |
| 16-00063-01 | 0062-13222-01 | PANEL BRACKET, UPPER LEFT |
| 16-00088-00 | 0061-06804-01 | EXHAUST BOX, RC FORELINE |
| 16-00089-00 | 0061-13899-01 | PLATE, GAS DISTRIBUTION |
| 16-00092-00 | 0011-22573-01 | WIRE, INSULATED, CERAMIC BEAD, SHORT |
| 16-00098-00 | 0011-22572-01 | WIRE, INSULATED, CERAMIC BEAD, LONG |
| 16-00106-00 | 0061-07275-01 | FLANGE, 3.5" AIR DUCT, 200MMM C1 |
| 16-00108-00 | 0062-13372-01 | PANEL,RIGHT,REAR,LOWER,TOP, C1 150MM FORELINE (2 OF 2 PCS) |
| 16-00119-00 | 0062-07400-01 | FORELINE COVER, TOP 200MM, C1 |
| 16-00120-00 | 0062-13257-01 | PANEL, FORELINE BOTTOM, 200MM |
| 16-00148-00 | 0062-13340-01 | PANEL,LEFT,REAR,LOWER,C1 (6) |
| 16-00190-00 | 0003-02670-01 | BRKT, VALVE MTG, SIGMA6 |
| 16-024504-01 | 0032-21392-01 | TUBE, EXHAUST LINE, 13.55" |
| 16-08109-00 | 0032-18005-01 | SPOOL, STUB, 5-PORT, KF25 |
| 16-72159-00 | 0061-10557-01 | LOAD LOCK CHAMBER, 26 WAFER, C1 |
| 17-00008-00 | 0062-02150-02 | BEZEL, FRONT MONITOR GENERIC ALUM (150/200MM) RAM STANDARD |
| 17-00010-00 | 0062-06674-01 | ELECTRICAL ENCLOSURE PRESSURE CNTRL ASSY (4-PIECES) |
| 17-00011-00 | 0062-02578-01 | BRACKET, REAR, C1 FRONT MONITOR |
| 17-00018-00 | 0062-05712-01 | COVER, FACILITY PANEL, POWER, C1-150 |
| 17-00022-00 | 0062-05773-01 | COVER, SWITCH, FAC. PANEL, 150 OR 200MM |
| 17-00055-00 | 0062-02552-01 | BRACKET, LIGHT FIXTURE |
| 17-00059-00 | 0062-02579-01 | BRACKET, RECEPTACLE |
| 17-00075-00 | 0062-13870-01 | PLATE, AUDIBLE ALARM, BEZEL |
| 17-00094-00 | 0003-18220-01 | STRAP, RF |
| 17-00094-01 | 0003-18217-01 | STRAP, LF BIAS, ALUM |
| 17-00108-00 | 0062-06709-01 | ENCLOSURE, 11-CHANNEL EXTERNAL GASBOX |
| 17-00121-00 | 0062-05710-01 | COVER, FACILITY PANEL, POWER |
| 17-00121-00 | 0062-05711-01 | COVER, FACILITY PANEL, POWER, 200MM C1 |
| 17-00124-00 | 0062-02574-01 | BRACKET, PURGE SWITCH, 11 CHANNEL GAS BOX, C1 |
| 17-00126-00 | 0069-05770-01 | COVER, SPINDLE ASSY 200MM C1 |
| 17-00148-00 | 0003-18048-01 | SPRING, FORK |
| 17-00156-01 | 0062-11429-B | MOUNTING PLATE, FRONT MONITOR |
| 17-00175-00 | 0062-04763-01 | CLAMP, CERAMIC FORK FIXTURE |
| 17-00224-00 | 0062-05765-01 | COVER, RF, TEOS |
| 17-00250-00 | 0062-13268-01 | PANEL, PURGE/BACKFILL |
| 17-00300-00 | 0021-02561-01 | BRACKET, MTG TOGGLE VALVE |
| 17-00302-00 | 0062-06711-01 | ENCLOSURE, GAS BOX (9-CHANNEL NG) |
| 17-00303-00 | 0062-10468-01 | LID ASSY W CATCHES, 9-CH GASBOX ENCLOSURE |
| 17-00312-00 | 0062-06714-01 | ENCLOSURE, OPTICAL EMISSION |
| 17-021366-00 | 0062-02557-B | BRACKET, MFC HORIZONTAL MOUNT (CH. B3 AND B5) |
| 17-021433-00 | 0062-13905-01 | PLATE, I/F PCB MOUNTING |
| 17-024434-00 | 0062-07239-01 | FLAG, OPTO SENSOR, LONG, 200MM |
| 17-027150-00 | 0062-02573-01 | BRACKET, POWER CONDITIONER MOUNTING |
| 17-028729-00 | 0099-13920-01 | PLATE, MOUNTING, MEGAPAC, C1 |
| 17-032018-00 | 0062-16117-01 | SCREEN, RF SHIELD, ETCHED |
| 17-049868-00 | 0062-18243-01 | STRAP,GROUND,GAS LINE, |
| 17-055801-00 | 0062-04494-01 | CHASSIS FACEPLATE, W SQUARE 1/16 DIN CUTOUT FOR DIGITAL OVERTEMP |
| 17-103987-00 | 0062-18258-01 | STRAP,RF, NEW STYLE |
| 19-00020-02 | 0061-17156-01 | SHAFT, LOAD LOCK MODIFICATION |
| 19-00022-00 | 0061-17143-01 | SHAFT, BAFFLE MODIFICATION |
| 19-00028-00 | 0061-17142-01 | SHAFT, 1.5" DIA, LIFT (THOMSON ROD) |
| 19-00049-00 | 0068-02445-01 | BOOT, RUBBERIZED, 5" ID |
| 19-00056-00 | 0010-06675-01 | ELECTRICAL FEEDTHRU ASSY, OLD STYLE |
| 19-00072-00 | 0032-08798-01 | INSERT, TUBE FITTING, 1/8" (FOR 10 AIRLINE BULKHEAD CONNECTORS) |
| 19-00079-00 | 0075-01851-01 | BALL SPLINE SHAFT W/ HOUSING |
| 19-00108-00 | 0011-03254-01 | CABLE ASSY, MAIN ARM |
| 19-00109-00 | 0011-03237-01 | CABLE ASSY, FOREARM |
| 19-00111-00 | 0002-10381-01 | LEADSCREW (WITH NUT) |
| 19-00122-00 | 0041-13546-01 | PCB, RAM/EPROM MEMORY |
| 19-00126-00 | 0041-13516-01 | PCB, ANALOG INPUT |
| 19-00154-01 | 0061-08329-01 | HEATER BLOCK ASSY, SLOTTED, 200MM |
| 19-00155-01 | 0017-08331-01 | HEATER BLOCK ASSY, SLOTTED, 150MM |
| 19-00161-00 | 0016-11348-01 | MOTOR, STEPPER, WTM EXTENSION |
| 19-00249-00 | 0021-21708-01 | VALVE, ANGLE, 2" W/LIMIT SWITCH/CABLE |
| 19-00260-05 | 0003-10712-01 | MANIFOLD, 5-STATION |
| 19-00261-00 | 0074-02073-01 | BELLOWS, MODIF., END |
| 19-00262-00 | 0032-06652-01 | ELBOW, KF50 MODIF. |
| 19-00266-01 | 0016-11306-01 | MOTOR, EXT |
| 19-00267-01 | 0016-11309-01 | MOTOR (ROTATION) |
| 19-00268-01 | 0016-11308-01 | MOTOR (LIFT) |
| 19-00323-00 | 0061-07992-01 | GEAR, SPUR |
| 19-00331-00 | 0041-13511-01 | PCB, 4-PORT, RS232, W/CABLE |
| 19-034573-03 | 0075-01986-01 | BEARING,
ROTARY, .875 X 0.5 MOTION - SR 6-5 ABEC5 C-3 |
| 19-034573-04 | 0075-01978-01 | BEARING, LINEAR/ROTARY, 1" |
| 19-034573-07 | 0075-01958-01 | BEARING, 1.06 OD |
| 19-034573-08 | 0075-01960-01 | BEARING, 1.50 OD |
| 19-034573-10 | 0075-01961-01 | BEARING, 2.50 OD |
| 19-034573-13 | 0075-02015-01 | BEARING,LINEAR SINGLE |
| 19-034573-14 | 0075-01973-01 | BEARING, LINEAR (RAIL BEARING) |
| 19-034573-15 | 0075-01982-01 | BEARING, RADIAL, 7/8 OD |
| 19-034772-00 | 0090-07530-01 | FTG,MODIFIED,SS-4-VCR-61 |
| 19-140178-00 | 0044-06686-01 | ELO FRONT MONITOR (TOUCH SCREEN) |
| 20-00001-00 | 0064-17666-01 | SHROUD, MEGAPACK, POWER STACK (CLEAR PLASTIC) |
| 20-00020-01 | 0075-02239-01 | BLOCK, TWIN PILLOW (1.5" BUSHING) |
| 20-00064-00 | 0006-18046-01 | SPRING, COMPRESSION, 7/8" X 0.36" |
| 20-00067-00 | 0002-04959-01 | CLEVIS, WITH CLEVIS PIN |
| 20-00070-00 | 0007-15663-01 | RING, RETAINING, 0.5" EXT |
| 20-00072-00 | 0002-04958-01 | CLEVIS, PISTON ROD, 4" STROKE, 7/16-20 THREAD |
| 20-00074-00 | 0007-15667-01 | RING, RETAINING, EXT. 3/16 |
| 20-00081-00 | 0075-01981-01 | BEARING, OIL-LESS |
| 20-00081-02 | 0075-02903-01 | BUSHING, 7/16" ODX 17/32" ID, DU14-18 |
| 20-00118-00 | 0002-16497-01 | SCREW, KEYBOARD PIVOT MOUNT/ 5/16-18 |
| 20-00144-00 | 0016-02112-01 | BELT, TIMING (150MM) |
| 20-00160-20 | 0069-15109-01 | REMOTE AC CVD DIELECTRIC W/ACP 200MM |
| 20-00167-00 | 0004-22291-01 | WASHER, NYLON, 0.503" DIA |
| 20-00180-00 | 0002-16529-01 | SCREW, SHLDR, 10-32 X 1.25", SS |
| 20-00181-00 | 0002-11695-01 | NUT, AERO, 5/16-24, THIN |
| 20-00207-00 | 0002-21554-01 | U-BOLT, 2" LINE |
| 20-00212-00 | 0002-11680-01 | NUT 8-32 UNC 2B ALUM |
| 20-00214-00 | 0006-18039-01 | SPRING, BEARING, PRELOAD |
| 20-00222-00 | 0004-22244-01 | WASHER, FLAT, 1/4", ALUMINUM |
| 20-00248-00 | 0061-17837-01 | SPACER, #5 SHAFT X 0.060" TK |
| 20-00249-00 | 0002-16535-01 | SCREW, SHOULDER, 4-40 X 5/32" |
| 20-00255-00 | 0004-22300-01 | WASHER, SPRING, 2.12 OD |
| 20-00271-00 | 0002-16575-01 | SCREW, THUMB, 10-32 |
| 20-00275-00 | 0002-16519- | SCREW, PANHD, 6-32 X 3/4" |
| 20-00288-00 | 0016-02113-01 | BELT, TIMING (200MM) |
| 20-00289-00 | 0016-14567-01 | PULLY, MOTOR (200MM) |
| 20-00290-00 | 0016-14564-01 | PULLY, DRIVER (200MM) |
| 20-10130-00 | 0059-16966-01 | SEAL, BEARING |
| 21-00279-00 | 0002-16528-01 | SCREW, SHC 10-32 X .50 |
| 21-00444-00 | 0002-11689-01 | NUT, .500-20, CHECK, SS |
| 22-00006-00 | 0027-06965-01 | FILTER, WAFERGARD, LP-MINI, 1/4" VCR |
| 22-00010-00 | 0033-07166-01 | FITTING, BULKHEAD 1/4" VCR |
| 22-00015-00 | 0030-14237-01 | PLUG, VCR 1/4" SS |
| 22-00021-01 | 0055-11897-01 | O RING 1.984 X.139 BUNA |
| 22-00022-00 | 0054-22039-01 | VCR GASKET 3/8 |
| 22-00036-00 | 0033-07452-01 | FTG, 3/8 ULTRA-TORR 1/4NPT, CAJON: SS-6-UT-1-4 |
| 22-00053-00 | 0055-12128-01 | O-RING, 0.676" X 0.070", VITON |
| 22-00090-00 | 0027-06954-01 | FILTER, 0.2 MICRON, HIGH FLOW |
| 22-00092-00 | 0033-18615-01 | TEE, RUN,118" NPR X 114" |
| 22-00093-00 | 0033-07161-01 | FITTING, 9/16-18 ST X 1/4" VCR |
| 22-00095-00 | 0033-05412-01 | CONNECTOR, 9/16-18 ST X 3/8" VCR |
| 22-00103-00 | 0033-14224-01 | PLUG, BARB FITTING, 1/4" |
| 22-00118-00 | 0055-12139-01 | O-RING, 1.234" X 0.139", VITON |
| 22-00132-00 | 0002-05126-01 | COLLAR, SETSCREW, 1/4" SHAFT |
| 22-00134-00 | 0055-12229-01 | O-RING, LL WINDOW |
| 22-00136-00 | 0055-12228-01 | O-RING, LL LEFT PLATE, 15.475" X 0.275", BUNA |
| 22-00152-00 | 0055-12191-01 | O-RING, 4.600" X 0.210", BUNA (TOP VIEWPORT) |
| 22-00155-00 | 0055-12179-01 | O-RING, 2.609" X 0.139", BUNA |
| 22-00171-00 | 0033-07156-01 | FITTING, 10-32 ST X 1/8" BARB |
| 22-00174-00 | 0055-12197-01 | O-RING, 6.234" X 0.139", VITON |
| 22-00176-00 | 0055-12150-01 | O-RING, 12.975" X 0.139", BUNA (ROBOT BASEPLATE) |
| 22-00179-00 | 0032-06640-01 | ELBOW UNION 3/8" O-SEAL |
| 22-00182-00 | 0032-08796-01 | INSERT, STRAIGHT, 1/8" FLOW, 1/4", SHUTOFF |
| 22-00189-00 | 0033-07177-01 | FITTING, S/S BULKHEAD UNION 1/4" |
| 22-00198-00 | 0032-05609-01 | COUPLING, MALE, MULTIPLE, 1/4" |
| 22-00202-00 | 0033-07154-01 | FITTING, 1/8" SWG X 1/8" NPT |
| 22-00217-00 | 0055-12126-01 | O-RING, 0.484" X 0.139", VITON |
| 22-00234-00 | 0055-12203-01 | O-RING, 7.48" X 0.139", VITON |
| 22-00235-00 | 0055-12249-01 | O-RING, VITON, 30.12" X 0.275", #30.12X.275V75 |
| 22-00236-00 | 0055-12199-01 | O-RING, 7.45" X 0.275", VITON |
| 22-00239-00 | 0055-11899-01 | O RING 5.984 X .139 VITON |
| 22-00244-00 | 0033-06644-01 | ELBOW, 1/8" MPT X 1/8" TUBE |
| 22-00245-00 | 0033-06643-01 | ELBOW, 1/8" MPT X 1/4" TUBE |
| 22-00247-00 | 0003-01971-01 | BEARING, FLANGED, 3/8" ID |
| 22-00248-00 | 0075-01845-01 | BALL BEARING, 3/8"ID X 7/8"OD X .2188"WIDE |
| 22-00252-00 | 0033-07169-01 | FITTING, ELBOW 1/4 SWAGELOK PANEL MOUNT |
| 22-00256-00 | 0055-12186-01 | O-RING, 3 1/2"IDX3 3/4"ODX1/8"W |
| 22-00261-00 | 0075-01987-01 | BEARING, SPLINE ASSY |
| 22-00288-00 | 0051-18536-01 | T-SEAL, 15/16" IDX1 3/16"OD |
| 22-00299-00 | 0075-01966-01 | BEARING, CAM FOLLOWER |
| 22-00300-00 | 0032-04080-01 | CAP VCR |
| 22-00304-00 | 0075-01959-01 | BEARING, 1.50 O.D. |
| 22-00311-00 | 0055-12190-01 | O-RING, 4.234 ID |
| 22-00313-00 | 0055-12180-01 | O-RING, 2.725 ID |
| 22-00324-00 | 0051-16980-01 | SEAL, LIP (EXT) |
| 22-00325-00 | 0051-16981-01 | SEAL, LIP (ROTATION) |
| 22-00326-00 | 0055-12185-01 | O-RING, 27.18" X 0.275", BUNA |
| 22-00337-00 | 0021-21705-01 | VALVE, 3-WAY AIR-OP |
| 22-00342-00 | 0033-11678-01 | NUT 3/8" O-SEAL ULTRATORR |
| 22-00343-00 | 0033-17742-01 | SLEEVE 3/8" O-SEAL ULTRATORR |
| 22-00344-00 | 0055-11893-01 | O RING .364 X .07 VITON |
| 22-00345-00 | 0055-11895-01 | O RING, .362 X .170, VITON |
| 22-00358-00 | 0055-12122-01 | O-RING, 0.239" X 0.070", VITON (QTY 2) |
| 22-00361-00 | 0055-12189-01 | O-RING, 31.12" X 0.275", VITON, 200 MM |
| 22-00365-00 | 0033-18611-01 | TEE, BRANCH, 1/4" MPT X 1/4" T |
| 22-00366-00 | 0033-06642-01 | ELBOW, 1/4" MPT X 1/4" TUBE |
| 22-00391-00 | 0055-11894-01 | O RING .864 X .070 VITON |
| 22-00400-00 | 0055-12245-01 | O-RING, VIEWPORT, WAFER SENSOR, BUNA |
| 22-00417-00 | 0051-07882-01 | GASKET/RETAINER, 1/4 |
| 22-00427-00 | 0033-11691-01 | NUT, 1/4" TUBE, ULTRA-TORR |
| 22-00429-00 | 0033-17745-01 | SLEEVE, 1/4" TUBE, ULTRA-TORR (QTY 2) |
| 22-00430-00 | 0021-21717-01 | VALVE, FLOW CONTROL, 1/4NPTX1/4TUBE |
| 22-00435-00 | 0051-07828-01 | GASKET, BUNA-N, 1/8" |
| 22-00612-00 | 0021-21740-01 | VALVE, PNEUMATIC, NC, 1/4" VCR |
| 22-00630-00 | 0055-12079-01 | O-RING KIT, GATE VALVE |
| 22-00648-00 | 0055-12148-01 | O-RING, 1/8 |
| 22-00653-00 | 0021-00245-01 | ADAPTER, KF40/KF50 |
| 22-00655-00 | 0021-21716-01 | VALVE, DIAPHRAM |
| 22-00656-00 | 0055-12200-01 | O-RING, 7.474 |
| 22-00657-00 | 0055-12207-01 | O-RING, 7.975" X 0.210", KALREZ |
| 22-00658-00 | 0055-12201-01 | O-RING, 7.475 |
| 22-00660-00 | 0023-10856-01 | MFC, 5 ML, TEOS (VCR) |
| 22-00702-00 | 0021-21704-01 | VALVE, 3-PORT AIR PILOT, |
| 22-00706-00 | 0021-21732-01 | VALVE, PIEZO, 2 SPLM |
| 22-00715-00 | 0033-14235-01 | PLUG, SSI 1/16" |
| 22-00718-00 | 0055-12176-01 | O-RING, 2-718, KALREZ |
| 22-00725-00 | 0055-12216-01 | O-RING, COOLING STATION |
| 22-00744-00 | 0021-21713-01 | VALVE, DIA., 1/8" VCR |
| 22-00745-00 | 0027-06955-01 | FILTER, 1/8 VCR LIQ. |
| 22-00762-00 | 0033-14219-01 | PLUG, 1/8 VCR |
| 22-00763-00 | 0090-06645-01 | ELBOW, 1/8" OD, 1/8" NPT |
| 22-00775-00 | 0055-12213-01 | O-RING, ADAPTOR |
| 22-00792-00 | 0051-08079-01 | GSKT,VCR,1/8,UNPLATED NICKEL |
| 22-08944-00 | 0033-14227-01 | PLUG, CAP, 1/4" VCR |
| 22-10018-00 | 0055-12155-01 | O-RING, 16 X 16.375 |
| 22-10029-00 | 0055-12157-01 | O-RING, 2-011, VITON |
| 22-10062-00 | 0055-12244-01 | O-RING, VIEWPORT, 9.225" X .210", VITON |
| 22-10067-00 | 0055-12175-01 | O-RING, 2-386, VITON, |
| 22-10068-00 | 0055-12174-01 | O-RING, 2-383 VITON |
| 22-10095-00 | 0055-12167-01 | O-RING, 2-235 VITON |
| 22-10117-00 | 0055-12169-01 | O-RING, 2-263 VITON |
| 22-10239-00 | 0090-06896-01 | FEM.,CONN 1/8 NPT-1/4 |
| 22-10291-00 | 0059-16968-01 | SEAL, DOOR, LEFT |
| 22-10292-00 | 0059-16969-01 | SEAL, DOOR, RIGHT |
| 22-10349-00 | 0055-12115-01 | O-RING, .984ID X .070 |
| 22-10367-00 | 0055-12059-01 | O-RING HATCH |
| 22-10372-00 | 0055-12171-01 | O-RING, 2-347 VITON |
| 22-10379-00 | 0055-12255-01 | O-RING, WINDOW, ARCS, 6.225 X 0.210 |
| 22-10390-00 | 0055-12426-01 | O-RING,2-378,VITON |
| 22-10392-00 | 0055-12253-01 | O-RING, VITON, TOP COVER, 31.95 X .210 |
| 22-112017-00 | 0004-22637-01 | WSHR,BRS,.262IDX.565 00X.044 |
| 27-00002-00 | 0018-04092-01 | CAP, MANOMETER, 10 TORR |
| 27-00009-00 | 0021-05530-01 | OBSOLETE--REPLACED BY 27-053667-00 |
| 27-00010-01 | 0014-18699-01 | THERMOCOUPLE, TYPE J, 1/8" |
| 27-00029-00 | 0015-14379-01 | POWER SUPPLY, DC, QUAD OUTPUT, 5V, 50A |
| 27-00050-00 | 0018-07941-01 | GAUGE, EXHAUST PRES INTERLOCK |
| 27-00062-00 | 0025-07944-01 | GAUGE, VACUUM PRES, TC, HASTINGS |
| 27-00079-00 | 0014-18698-01 | THERMOCOUPLE, TYPE J, 1/16 |
| 27-00117-01 | 0044-05539-01 | CONTROLLER, TEMPERATURE, "E-TYPE" |
| 27-00127-00 | 0014-18697-01 | THERMOCOUPLE, TYPE E, LG |
| 27-00142-00 | 0021-05544-01 | CONTROLLER, VALVE DISPLAY |
| 27-00148-01 | 0021-21746-01 | VALVE, THROTTLE, 2", KF50 |
| 27-00149-01 | 0018-10748-01 | MANOMETER, DIFFERENTIAL, 1 TORR, 0-10 VDC |
| 27-00159-00 | 0018-10749-01 | MANOMETER, DIFFERENTIAL, 10 TORR, 0-10 VDC |
| 27-00160-00 | 0021-05529-01 | CONTROLLER, PIEZO VALVE |
| 27-00161-00 | 0015-14376-01 | POWER SUPPLY, BF SOFTSTART, 24VDC |
| 27-00175-00 | 0041-04152-01 | CARD,INTERFACE,ELEC/PNEU |
| 27-00196-00 | 0015-06744-01 | ENI LF GENERATOR, PL2HF, 1.2 KW |
| 27-024348-00 | 0018-05540-01 | CONTROLLER, TEMPERATURE, HEATED PROCESS |
| 27-027151-00 | 0015-14358-01 | POWER CONDITIONER, 12A, 1440VA |
| 27-028379-00 | 0071-00327-01 | AE PDX1400 1.4KW LF RF GENERATOR |
| 27-029507-00 | 0018-13552-01 | PCB, TWO-CHANNEL DETECTOR, ANALOG |
| 27-032653-00 | 0015-18903-01 | TRAZAR MATCHING NETWORK, AMU2-1, W/ARC SENSOR |
| 27-034212-00 | 0071-00328-01 | AE RFG3000 2.75KW 13.56MHZ HF GENERATOR |
| 27-034213-00 | 0071-00332-01 | AE RFG5500 5KW HF GENERATOR |
| 27-053667-00 | 0090-05066-01 | PRESSURE CONTROLLER |
| 27-053911-00 | 0044-05037-01 | CNTRLR,DISP,T-VLV,ACR28 |
| 27-10090-00 | 0045-06562-01 | DRIVE, EXTERNAL FD, 3-1/2", 1.44MB |
| 27-10138-00 | 0090-10829-01 | METER,DC,DIGITAL, 4 1/2 |
| 27-101462-00 | 0045-11292-01 | MONITOR, C1 SIDE |
| 27-115617-00 | 0015-00330-01 | AE RFG5500 5KW HF GENERATOR |
| 27-115666-00 | 0021-11212-01 | MKS 651,CONTROLLER, PRESS., THROTTLE VALVE (LOADLOCK) NEW STYLE |
| 27-15394-01 | 0019-11332-01 | MOTOR DRIVER, ROBOT EXTENSION/ROTATION, CONCEPT1, 70V |
| 29-00052-00 | 0014-04135-01 | CAPACITOR, 0.01 UF, 250VAC, CERAMIC |
| 31-00003-00 | 0090-07619-01 | FUSE HOLDER, BUSSMANN |
| 31-00004-00 | 0013-07653-01 | FUSE, BUSSMANN |
| 31-00005-00 | 0014-06628-01 | EF SERIES LINE FILTER |
| 31-00006-00 | 0018-07940-01 | GAUGE, EXCESS TEMP. INTERLOCK |
| 31-00007-00 | 0014-13225-01 | PANEL JACK THERMOCOUPLE TYPE JP |
| 31-00007-01 | 0014-18452-01 | SWITCH, WATER FLOW(OBS:05-00197-00) |
| 31-00008-00 | 0012-13226-01 | PANEL JACK THERMOCOUPLE |
| 31-00009-00 | 0012-05968-01 | D-SUB CONNECTOR 25 POS FEMALE |
| 31-00010-00 | 0014-18670-01 | TERMINAL STRIP 10 POS |
| 31-00011-00 | 0014-09002-01 | J-TYPE JUMPER |
| 31-00012-00 | 0010-18694-01 | THERMOCOUPLE WIRE |
| 31-00013-00 | 0010-18695-01 | THERMOCOUPLE WIRE |
| 31-00015-00 | 0010-14359-01 | POWER CORD |
| 31-00016-00 | 0010-02043-01 | BELDON 3 COND. 18 AWG |
| 31-00017-00 | 0011-00141-01 | 6 COND. 20 AWG CABLE |
| 31-00020-00 | 0010-18662-01 | TERMINAL BLOCK MARKER STRIP |
| 31-00112-00 | 0014-13667-01 | PILOT LIGHT MODULE, 24V |
| 31-00114-00 | 0014-15055-01 | RELAY SSR, 90A |
| 31-00199-00 | 0099-06386-01 | DIODE, 1N4004 |
| 31-00222-00 | 0014-04820-01 | CLAMP, RETAINING, 0.25" |
| 31-00249-00 | 0014-00421-01 | AMPLIFIER, MODULATED |
| 31-00273-00 | 0090-07698-01 | FUSEHOLDER, W/PULLER |
| 31-00293-00 | 0014-00420-01 | AMPLIFIER, BANNER MPC3A |
| 31-00311-00 | 0014-17788-01 | SOCKET, RELAY, DPDT |
| 32-00005-00 | 0014-08671-01 | IC, SN74LS244N |
| 32-00008-00 | 0014-08673-01 | IC, SN74LS74AN |
| 32-00009-00 | 0014-08670-01 | IC, SN74LS123N |
| 33-153940-00 | 0016-11346-01 | MOTOR, ROBOT, CONCEPT 1, ZETA MOTOR, EXTENSION/ROTATION |
| 34-00010-00 | 0014-10328-01 | LAMP, 28VAC (FOR INDICATOR LAMPS ON DOOR) |
| 34-00027-00 | 0014-18434-01 | SWITCH, PB, GREEN CAP |
| 34-00032-01 | 0081-06693-B | EMO SWTCH TWIST LOCK |
| 34-00040-00 | 0014-15057-01 | RELAY, SSR, AC24 |
| 34-00055-01 | 0014-18429-01 | SWITCH, KEY-LOCK, 3-WAY (SUBSTITUTE 2-WAY DEPENDING ON REV) |
| 34-00056-00 | 0014-18426-01 | SWITCH, INTERLOCK (SW3) |
| 34-00099-00 | 0014-15051-01 | RELAY, LOA, 24 VDC (CR7/9) |
| 34-00112-00 | 0014-18442-01 | SWITCH, QUICK CONNECT |
| 34-00121-00 | 0014-18423-01 | SWITCH, INTERLOCK |
| 34-00122-00 | 0014-05485-01 | CONTACTOR, NEMA3, 120VAC (CON1) |
| 34-00135-00 | 0014-04559-01 | CKT BKR, 100A-3P (CB1) |
| 34-00141-00 | 0014-18400-B | SWITCH PB RESET |
| 34-00142-00 | 0014-15056-01 | RELAY, SSR, AC15 |
| 34-00182-00 | 0014-04540-01 | CIRCUIT BREAKER, 32A-1P |
| 34-00223-00 | 0014-05478-01 | CONTACTOR, 35A (CON101) |
| 34-00224-00 | 0014-04569-B | CKT BKR, 30A-3P (CB2 [150MM] , CB3/4) |
| 34-00225-00 | 0014-04561-B | CKT BKR, 15A, 2P (CB102) |
| 34-00226-00 | 0014-04563-B | CKT BKR, 20A 2P (CB101) |
| 34-00227-00 | 0014-05480-01 | CONTACTOR, FUJI, 35A, 24V (CON2) |
| 34-00229-00 | 0014-05482-01 | CONTACTOR, FUJI, 50A, 24VAC (CON3) |
| 34-00230-00 | 0014-04568-B | CKT BKR, 30A-2P (CB5) |
| 34-00231-00 | 0014-04571-B | CKT BKR, 40A-3P (CB2) 200MM ONLY |
| 34-00237-00 | 0014-15050-01 | RELAY, 2P, DOUBLE-THROW, 24VAC (CR7/8) |
| 34-029353-20 | 0014-04565-B | CKT BKR, 20A-3P |
| 34-029889-12 | 0014-04170-01 | CARTRIDGE, 12V OAR 8.3AFL (ONLY WITH 90V MOTORS) |
| 34-029889-15 | 0014-04171-01 | CARTRIDGE, 15V MULTIBUS 10.0AFL |
| 34-029889-24 | 0014-04175-01 | CARTRIDGE,24V CONTRL 8.3AFL |
| 34-029889-50 | 0014-04177-01 | CARTRIDGE,5V TERM PAN 20AFL |
| 34-029889-51 | 0014-04176-01 | CARTRIDGE,5V MULTIBUS 30 AFL |
| 34-029889-70 | 0015-04174-01 | CARTRIDGE, 70V, (ONLY WITH NEW STYLE OAR 70V MOTORS) |
| 34-029889-90 | 0014-04178-01 | CARTRIDGE,90V OAR 2.1ALZ25 (ALTERNATE IS 2.1ALT2) |
| 34-029945-00 | 0014-15760-01 | RELAY,SSR DC-DC D1D07 |
| 34-09224-00 | 0014-15058-01 | RELAY, SSR, ODC15 |
| 34-10179-00 | 0014-02867-01 | BULB, HIM BOX, 0.06 W 1.35V |
| 34-112710-00 | 0014-17065-01 | SENSOR WITH CABLE + CONNECTOR, RED WOPS, |
| 36-00010-00 | 0014-07636-01 | FUSE, 1A, 250V, TYPE T |
| 36-00011-00 | 0014-07642-01 | FUSE, 30A, 32V, 3AG (F1) |
| 36-00012-00 | 0014-07644-01 | FUSE, 40A, FAST-ACTING (FU105/6) |
| 36-00015-00 | 0014-07649-01 | FUSE, 6A, 250V, 3AG FA (F2/F3) |
| 36-00023-00 | 0014-07646-01 | FUSE, 5A, 600V (FU9) |
| 36-00040-00 | 0014-07639-01 | FUSE, 3 1/2A, FNM-3.5 (FU1) |
| 36-00041-00 | 0014-07650-01 | FUSE, 7A, FNM-7" (FU2) |
| 36-027112-00 | 0013-07681-01 | FUSE,7A, 125V, FAST-ACTING |
| 36-032705-00 | 0014-07643-01 | FUSE, 3A, SLO-BLO |
| 38-00055-00 | 0021-03884-01 | CABLE, VALVE CONTROLLER (CA71) |
| 38-00031-00 | 0011-03213-01 | CABLE ASSY, CA 55 |
| 38-00032-00 | 0011-00618-01 | ASSY, CABLE CA 56 |
| 38-00047-00 | 0011-03874-01 | CABLE, POWER, 10A, 125VAC |
| 38-032614-00 | 0011-03881-01 | CABLE, TEMPERATURE CONTROLLER |
| 38-112711-00 | 0011-06928-01 | FIBER OPTIC CABLE ASSY W LENS, 6' (RAM RED WOPS) |
| 38-154197-00 | 0011-03199-01 | CABLE ASSY WITH STRAIN RELIEF, ZETA ROTATION MOTOR |
| 39-00031-00 | 0012-05413-01 | CONNECTOR, DB25(25) S-CUP TRAT. |
| 39-00075-00 | 0012-05406-01 | CONNECTOR, 250V, 30A, FLANGED |
| 39-00087-00 | 0014-00248-01 | ADAPTER, PANEL MOUNT 10-AIR |
| 39-00095-00 | 0012-05409-01 | CONNECTOR, 4-POS. RECEPTICAL, LEMO |
| 39-00110-00 | 0012-05418-01 | CONNECTOR, HEATER ISO BOX, RF |
| 39-00113-00 | 0002-05405-01 | CONNECTOR, 2-SCREW, INSULATED, 1" |
| 39-00134-00 | 0012-05612-01 | COUPLING, PNEU., 10-LINE |
| 39-70466-00 | 0012-14233-01 | PLUG, NEMA5-15P,15A,125V RT ANGLE |
| 60-00001-00 | 0021-21748-01 | VALVE, THROTTLE, VACUUM CONTROL |
| 60-00005-00 | 0025-07945-01 | GAUGE, VACUUM, TUBE TC |
| 60-00012-00 | 0022-05949-01 | CYLINDER, PNEUMATIC, CASS DOOR |
| 60-00015-00 | 0055-15603-01 | RING, CENTERING, ORING, KF50 |
| 60-00016-00 | 0033-04787-01 | CLAMP, KF50 |
| 60-00018-00 | 0033-04780-01 | CLAMP, KF25 |
| 60-00019-00 | 0055-15602-01 | RING, CENTERING, ORING, KF25 |
| 60-00023-00 | 0021-21744-01 | VALVE, SOLENOID, 4- W |
| 60-00026-00 | 0055-15601-01 | RING, CENTERING, NW100 |
| 60-00033-00 | 0027-06956-01 | FILTER, BACKFILL |
| 60-00040-00 | 0033-04781-01 | CLAMP, KF40 |
| 60-00055-00 | 0032-07937-01 | GAUGE TUBE, VAC, CONVECTRON |
| 60-00057-00E | 0011-03835-01 | CABLE, ADAPTOR NEW FOR 375 CONVECTRON |
| 60-00091-00 | 0022-05951-01 | CYLINDER, PNEUMATIC, SPINDLE LIFT |
| 60-00101-00 | 0014-18413-01 | SWITCH, AIR PRES, 35-80 PSIG |
| 60-00106-00 | 0068-02444-01 | BOOT, RUBBERIZED, 3" ID |
| 60-00133-00 | 0021-21706-01 | VALVE, 3-WAY TOGGLE |
| 60-00134-00 | 0018-07938-01 | GAUGE, 30-0-30 PSI MALE VCR |
| 60-00146-00 | 0021-21741-01 | VALVE, QUICK EXHAUST |
| 60-00148-00 | 0033-17721-01 | SILENCER, 1/4 NPT |
| 60-00155-01 | 0032-08542-01 | HOSE, FLEXIBLE, VCR |
| 60-00177-00 | 0014-00246-01 | ADAPTER, NW40 TO 1 1/2" |
| 60-00180-00 | 0014-21649-01 | VACUUM TRANSDUCER, DV-6M-KF25 FLANGE |
| 60-00183-00 | 0033-06651-01 | ELBOW, FLOW CONTROL, 1/4" OD |
| 60-00194-00 | 0014-18390-01 | SWITCH DIAPHRAM PRESSURE 20 TORR |
| 60-00198-00 | 0032-06649-01 | ELBOW, 45DEG BEND NW50 |
| 60-00199-00 | 0032-07285-01 | FLANGE, NW 80 TO NW 50 MF/KF |
| 60-00212-00 | 0014-07967-01 | GAUGE,TUBE |
| 60-00214-00 | 0090-10744-01 | MANOMETER, 10TORR,TYLAN GENRL |
| 60-08941-00 | 0032-21520-01 | TUBING,1/8 OD,1/16 ID,POLY (FT) |
| 60-10133-00 | 0014-16114-01 | SCREEN, NW40-150-SRV-SM |
| 60-10134-00 | 0053-16930-01 | SEAL ASSY, NW16, AL/VITON, MDC |
| 60-10142-00 | 0026-14406-01 | PRESS, REG O-150 PSI--AR10-M5BG-10 |
| 60-10170-00 | 0018-04131-01 | CAPACITANCE MANOMETER, 10T |
| 60-10317-00 | 0021-21747-01 | VALVE, THROTTLE, HEATED, VACUUM CONTROL |
| 60-10336-00 | 0021-21722-01 | VALVE, GATE, HEATED, 100VDC, ACTUAT, |
| 70-00058-00 | 0076-04225-01 | CASSETTE, METAL, 200MM, SOLID END |
| 79-124654-00 | 0092-18564-01 | TAG, UNUSED MATERIAL TAG |
| 88-00043-00 | 0014-22055-01 | VICOR, BUSBAR, 2 HOLES, |